防微振介绍参考课件.ppt
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1、1Vibration and Noise Design of Advanced Technology FacilitiesAhmad Bayat,P.E.J.Byron DavisVibro-Acoustic Consultants29 June 20042Vibration and Noise Design of Advanced Technology FacilitiesI.Brief background on VACCII.Vibration Design of FacilitiesProblem DefinitionTwo Design FundamentalsIII.Noise D
2、esign of FacilitiesIV.Tool Hook-UpV.Structural Evaluation3Background on VACCOur background4Western U.S.:Intel Fabs LCE,C6,11,12,22,23;Sandia Natl Labs;HP Fort Collins;Motorola COM1,MOS12,and Flat Panel;Micron Lehi,Boise,and Mask Shop;Atmel;Vitesse;Philips Fab 25;Microchip(Phoenix);NCR Projects Unite
3、d StatesTexas:Atmel;Motorola ULSI/MOS13;TI DMOS5,DMOS6,Kilby Center;AMD Fab 25;Samsung;Methodist Heart Center(Lubbock)East Coast:IBM(Burlington,East Fishkill);Dominion Semiconductor;Lucent(Orlando);Seagate(Pitts.);Natl Security Agency(Ft.Meade)5California:Intel Fabs D2,SC1,SC2,and IMO;Stanford Unive
4、rsity;AMAT Bldg.s 2,3,92,Arques Center,Scott Campus;IBM San Jose;IDT;LAM Research;Vishay/Siliconix;National Semiconductor;Linear Technology;AT&T;UC Campuses at Berkeley,Davis,and San Francisco;Lawrence Berkeley National Labs;Lawrence Livermore Natl Labs/National Ignition Facility;Projects US West Co
5、astPacific Northwest:Intel Fabs D1B,D1C,RB1,15,and Pathfinder;Hyundai;WaferTech Camus;Fujitsu Gresham;LSI Logic;IDT MASCA;Maxim;Seattle Ferry Terminal;University of Washington Cal Poly San Luis Obispo;International Rectifier;UC Irvine;ST Microelectronics6Projects Southeast AsiaTaiwan,R.O.C.:TSMC Fab
6、s 3,6,and 7;WaferTech;Quanta TFT;Arima;Formosa;Nan Ya Fabs 1 and 3;Winbond;Formosa;Macronix;OPTO Fab;AMAT Taiwan;Eagle TFT Fab;UMC;Powerchip Fab 2;Acer;Chunghwa Picture Tube;NanYa/Inotera China:Motorola Tianjin MOS17,MOS17-XKorea:CTIS Korea;AMAT Korea Thailand:SMTMalaysia:WTM/SilterraSingapore:ST Mi
7、croelectronics AMK8 7Projects EuropeScotland:Motorola East KillbrideIreland:Intel Fabs 10,24Italy:ST Microelectronics Catania M6France:ST Microelectronics Rousset 8Problem Definition:ProcessesBasic ResearchUniversities,National LabsCorporate R&DSemiconductors,DevicesFlat Panel Display TechnologiesPh
8、armaceuticals,BiotechnologyNanotechnology Mature ProcessesDeveloping ProcessesManufacturingMicroelectronics,Flat Panel DisplaysPharmaceuticals,Biotechnology ToolsNanotechnology(coming soon)Vibration Design of Advanced Technology Facilities9Problem Definition:Why Vibration?Submicron manufacturing/R&D
9、 usually in a super-clean environmentSensitivity vs.power:100/100 ruleMarriage of“Beauty”and“Beast”Vibration Design of Advanced Technology Facilities10Problem Definition:Sourcesv Rotating machinery(tones/BB)unknownv Piping/ductwork turbulence(BB)unknownv Movement of people/materials(BB)knownv Enviro
10、nmental sources usually knownVibration Design of Advanced Technology Facilities11Local&Environmental Sources12Typical Floor Vibration DataNarrowband(Bandwidth=0.46875)0.11.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s NarrowbandTones vs.Broadband“Tones”“Broadband Random Excitation”Vibra
11、tion Design of Advanced Technology Facilities13Typical Floor Vibration DataNarrowband(Bandwidth=0.46875)0.11.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s NarrowbandTones vs.BroadbandttDeterministic Sine Wave(tone)Frequency at Shaft SpeedAmplitude Unbalanced ForceVibration Design of Adv
12、anced Technology Facilities14Typical Floor Vibration DataSummed 1/3 Octave BandVC-DVC-E1.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s 1/3 Octave BandVC-D(250 micro-in/s)VC-E(125 micro-in/s)1/3 Octave Band DataDominated by 30Hz toneDominated by 60Hz toneVibration Design of Advanced Tech
13、nology Facilities151/3 Octave Band vs.Narrowband DataTypical Floor Vibration DataNarrowband,Resulting 1/3 Octave Band Data Overlay0.11.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s Narrowband1/3 Octave BandVibration Design of Advanced Technology Facilities16Importance of TonesTypical Fl
14、oor Vibration DataNarrowband(Bandwidth=0.46875)0.11.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s Typical Floor Vibration DataNarrowband(Bandwidth=0.46875)0.11.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s Vibration Design of Advanced Technology Facilities17Importance of To
15、nesTypical Floor Vibration DataSummed 1/3 Octave BandVC-DVC-E1.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s Typical Floor Vibration DataSummed 1/3 Octave BandVC-DVC-E1.010.0100.01000.0110100Frequency Hz RMS Velocity micro-in/s Vibration Design of Advanced Technology Facilities18Problem
16、 Definition:StructuresqMega fabs(usually 10,000+m2 CR)qSub-fabs(one-&two-level),stacked fabsqMostly concrete,mostly cast-in-placeqStructural isolation breaks(SIBs)qAccess floors vfrom 150mm to 1.7m vsecondary structures for sensitive toolsqSoil DynamicsVibration Design of Advanced Technology Facilit
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