CMOS工艺器件结构课件.ppt

1、CMOS工艺器件结构工艺器件结构CMOS工艺中常用的元器件 MOSFET(hv or lv)MOSFET(hv or lv)PMOS NMOS NMOS_dnw NMOS_native RESISTORRESISTOR CAPACITANCECAPACITANCE DIODEDIODE BIPOLARBIPOLAR INDUCTORINDUCTOR一、MOSFETNmos Nmos 版图版图Nmos Nmos 剖面图剖面图lNMOSFET NMOSFET 版图和结构版图和结构一、MOSFETNmos _naNmos _na版图版图Nmos_na Nmos_na 剖面图剖面图lNMOS_NA N

2、MOS_NA 版图和结构版图和结构一、MOSFETNmos_dnw Nmos_dnw 版图版图Nmos_dnw Nmos_dnw 剖面图剖面图lNMOS_dnw NMOS_dnw 版图和结构版图和结构一、MOSFETPmos Pmos 版图版图Pmos Pmos 剖面图剖面图lPMOSFET PMOSFET 版图和结构版图和结构二、RESISTORPoly resistor Poly resistor 版版图图Poly resistor Poly resistor 剖面图剖面图lPoly resistor Poly resistor 版图和版图和结构结构二、RESISTORnwell resi

3、stor nwell resistor 版版图图nwell resistor nwell resistor 剖面剖面图图lnwell resistor nwell resistor 版图和版图和结构结构二、RESISTOR普通普通poly resistor poly resistor 版图版图扩散电阻版图扩散电阻版图lOthers resistorOthers resistor版图和结构版图和结构三、CAPACITANCEMIM cap MIM cap 版图版图lMIMMIM版图和结构版图和结构THANK YOUSUCCESS2022-11-16可编辑三、CAPACITANCEMOM cap

4、MOM cap 版图版图lMOMMOM版图和结构版图和结构三、CAPACITANCEVAR cap VAR cap 版图版图lVARACTORVARACTOR版图和结构版图和结构VAR cap VAR cap 剖面图剖面图三、CAPACITANCEMOSMOS管做电容示意图管做电容示意图lMOS CAPMOS CAP版图和结构版图和结构四、DIODEDIODE DIODE 版图版图lPSD/NWELLPSD/NWELL版图和结构版图和结构DIODE DIODE 剖面图剖面图四、DIODEDIODE DIODE 版图版图lPSD/NWELLPSD/NWELL版图和结构版图和结构DIODE DIODE 剖面图剖面图五、BIPOLAR（BJT）l横向横向BJTBJT（pnppnp）版图和结构版图和结构DIODE DIODE 版图及对应剖面图版图及对应剖面图六、INDUCTORlINDUCTORINDUCTOR版图和结构版图和结构INDUCTORINDUCTOR版图版图目前基本能用到的都是目前基本能用到的都是metalmetal做的做的inductorinductor，务必选用务必选用PDKPDK中中cellcell，切勿修改。，切勿修改。谢谢！谢谢！THANK YOUSUCCESS2022-11-16可编辑