Fabrication-technology-of-piezoresistive-conductive-PDMS-for-对压阻式导电PDMS制作技术课件.ppt

1、Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensorsIEEE MEMS 2007Miao Lu,Amine Bermak,Yi-Kuen Lee學號:9635517姓名:陳立仁OutlineoIntroductionoMaterial characterizationoDevice fabricationoDevice characterizationoConclusionIntroductionWith the progress of computer and intern

2、et,our life become more convenient and comfortable.But it is also convenient for hackers.Though,how to keep personal privacy is very important.Introduction(cont.)http:/ characterizationCoductive PDMS(CPDMS):Mixture of PDMS and carbon blackGauge factor=(R/R0)/CPDMS7.4Constantan alloy2.1Si120Piezoresi

3、stive sensitivity(Pa )=(R/R0)/CPDMS3X10Si10-1-6-9Device fabrication1.Sputter Ti/W and Au electrodes2.Spin a layer of PR(AZ4620),then pattern the PR.Device fabrication(cont.)3.Electroplate the mushroom-shaped Au electrodes,then remove the PR.4.Spin and pattern another layer of PR.Etch electrodes and

4、remove PR.Device fabrication(cont.)5.Spin a layer of PR as a well.Pour the CPDMS on the substrate.6.Remove the excessive CPDMS.Strip the PR.Device fabrication(cont.)7.Deposit parylene to protect the electrode.8.Spin and pattern the PR.Etch parylene,then strip the PR.Device fabrication(cont.)Device characterizationDevice characterization(cont.)ConclusionoThe operating pressure range of this device is really close to that of commercial products.o If the package is not good enough,the sensing ability will be affected.o A well mixtured CPDMS is needed.Thanks for your attendance!