特气控制系统课件.ppt

1、1特气系统控制特气系统控制 气柜气柜VMB/VMPVMB/VMPPLCPLC盘面盘面电磁阀电磁阀气动阀气动阀GAS GAS CYLINDERCYLINDERSENSORSSENSORS易燃易爆：易燃易爆：SIH4/H4/B2H6/SIH4/H4/B2H6/ASH3/PH3 ASH3/PH3无毒：无毒：AR/HE/CF4/N2O/AR/HE/CF4/N2O/C2F6/SF6/O2-HE C2F6/SF6/O2-HE有毒：有毒：CL2/HBR/NH3/CL2/HBR/NH3/NF3/SIH2CL2/BCL3 NF3/SIH2CL2/BCL3设备设备LAMLAM易燃易爆：易燃易爆：SIH4/H4/B

2、2H6/SIH4/H4/B2H6/ASH3/PH3 ASH3/PH3有毒：有毒：CL2/HBR/NH3/CL2/HBR/NH3/NF3/SIH2CL2/BCL3 NF3/SIH2CL2/BCL3无毒：无毒：AR/HE/CF4/N2O/AR/HE/CF4/N2O/C2F6/SF6/O2-HE C2F6/SF6/O2-HEAMEMAMEMTCPMTCPMAMS101AMS101MRCMRCCVDCVDAPWJAPWJDFURDFUREPSLEPSLIMPIMP23电磁阀SENSORS456(二二)GAS FLOW SCHEMATIC-DUAL GSM WITH PURGE GAS MANIFOLD

3、)GAS FLOW SCHEMATIC-DUAL GSM WITH PURGE GAS MANIFOLD789105.5.气柜操作流程图气柜操作流程图SCREENMENUSCREENINPUTPASSWORDOPERATION SCREENA PANELOrB PANELSELECT GO TOA or B PANELNOAUTO PURGE(PREPURGE)FINISHCHANGE NEWCYLINDERTHEN PRESSACK.BUTTONNOPOSTPURGEFINISHPROCESS(INSTALL ESV)YSEYSECONFIRMLOAD CELL(NEW or OLDOPENCYLINDERLOW DELIVERYPRESSURE&HIGHDELIVERYPRESSURE(DO YOU WANGT TOPROCESS ORSTANDBY?SELECTPROCESSorSTANDBYPROCESSPROCESSSTANDBYSTANDBYSTANDBYSTANDBY11前吹扫：前吹扫：）放空（图一）放空（图一）开开）通）通关关开开）抽真空）抽真空开开图一图一12131415