基于AEMD平台加工的硅光子芯片课件.pptx
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- 基于 AEMD 平台 加工 光子 芯片 课件
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1、基于基于AEMD平台加工的硅光子平台加工的硅光子芯片芯片Silicon photonic chips fabricated in the AEMD center of SJTU1 1摘要摘要n关于关于AEMD加工平台加工平台n高效率高效率(21 nm/mW)纳米束热光可调纳米束热光可调滤波器滤波器n低功耗低功耗(0.16 mW)纳米束纳米束2x2热热光开关光开关n基于基于亚波长光栅的高旁瓣抑制比亚波长光栅的高旁瓣抑制比(27dB)带通滤波器带通滤波器n高高消光比消光比(30 dB)的偏振的偏振分束器分束器n超超紧凑的偏振分束和旋转紧凑的偏振分束和旋转器器n总结总结2 2OutlinenAbou
2、t AEMD centernHigh-efficiency(19 nm/mW)nanobeam thermo-optic filternLow-power(0.16 mW)nanobeam 2x2 thermo-optic switchnSubwavelength-grating bandpass filter with high sidelope suppression(27 dB)nHigh extinction ratio(30 dB)polarization beam splitternUltra-compact polarization beam splitter and rotat
3、ornSummary3 3OutlinenAbout AEMD centernHigh-efficiency(19 nm/mW)nanobeam thermo-optic filternLow-power(0.16 mW)nanobeam 2x2 thermo-optic switchnSubwavelength-grating bandpass filter with high sidelope suppression(27 dB)nHigh extinction ratio(30 dB)polarization beam splitternUltra-compact polarizatio
4、n beam splitter and rotatornSummary44净化面积:1510m2(东892m2+西618m2)配 置:6”半导体级实验线+3”非硅实验线+光电实验室设 备:价值7800万元人 员:25名工程师/行政人员运 行:2014.11.9正式对外运行AEMD 公共平台简介公共平台简介5AEMD设备配置设备配置状况状况6p校外单位:59家p校外用户账号数:77个p对外服务合同:102个p校外用户遍布全国:20个城市:北京大学、清华大学、浙江大学、南京大学、南京航天航空大学、华中科技大学、华东理工大学、西北工大、苏州大学、西南交大等:中科院技术物理所、微系统所、长春光机所、硅
5、酸盐所、中电58所、中电38所等:华为、中兴、武汉光讯、美国晟碟科技等AEMD服务的校外用户服务的校外用户7 7OutlinenAbout AEMD centernHigh-efficiency(19 nm/mW)nanobeam thermo-optic filternLow-power(0.16 mW)nanobeam 2x2 thermo-optic switchnSubwavelength-grating bandpass filter with high sidelope suppression(27 dB)nHigh extinction ratio(30 dB)polarizat
6、ion beam splitternUltra-compact polarization beam splitter and rotatornSummary8Nanobeam(1-dimensional photonic crystal):more compact than conventional 2D photonic crystalReflectorReflectorTaperTaperField distributionAdvantage of the nanobeam:ultra-compact mode volume(0.2m3),the smallest among all kn
7、own silicon-only devicesAbout Nanobeam9Higher tuning efficiency with a single resonance over a wide band Structures Tuning efficiencySingle resonanceMach-Zehnder interferometer(MZI)10.29 nm/mWNoSuspended microring 24.8 nm/mWNoPhotonic crystal nanobeam 30.27 nm/mWYes TO filters:state-of-the-artsOur g
8、oal:Ref:1.F.Gan et al.,MIT,Photonics in Switching,TuB3.3,2007 2.P.Dong et al.,Kotura,Optics Express,18(19),20298,2010 3.J.Zhang et al.,ZJU,Optics Express,25(11),12541,2017Proposed TO nanobeam filter10U l t r a-s m a l l mode volume u Single resonanceu High tuning efficiencyu Large tuning rangeS u s
9、p e n d e d structureu High tuning efficiencyHeater on slabu Fast response timeY.Zhang et al.Proc.INEC,pp.1-2,(2016).Design and simulation11p Mode volume:0.018 mm3Design of Nanobeam cavityThermal distributionp Simulated tuning efficiency 30 nm/mWDevice fabrication process12n Fabricated in the AEMD p
10、latform of Shanghai Jiao Tong UniversitySEM photos of fabricated nanobeam filter1314http:/Vertical coupling and edge coupling setupDevice testing instrumentMeasurement results15u Single-resonance tuning range of 34 nm 1.78 mWu Inter-channel crosstalk -9 dB 34 nm tuningu Inter-channel crosstalk -15 d
11、B 25 nm tuningu Tuning efficiency 19.32 nm/mWMeasured response times16p Measured 10%90%switching times 6 msp More than twenty times faster than those for the suspended MZI and microring devices 1,2p Attributed to that heater is directly placed on the silicon slabRef:1.P.Dong et al.,Kotura,Optics Exp
12、ress,18(19),20298,2010 2.P.Sun et al.,Ohio State University,Optics Express,18(8):8406,2010Comparison with previous TO filters17StructuresTuning efficiency(nm/mW)Response time(m ms)Single resonanceMach-Zehnder interferometer(MZI)10.2914No Microring 2 0.99No Adiabatic Resonant Microring 31.81No Suspen
13、ded microring 44.8170No Suspended MZI 5-141No Photonic crystal nanobeam 60.2713Yes Suspended nanobeam(our device)19.326Yes Ref:1.F.Gan et al.,Photonics in Switching,TuB3.3,2007 2.P.Dong et al.,Optics Express,18(10),2010 3.M.Watts et al.,CLEO,CPDB10,2009 4.P.Dong et al.,Optics Express,18(19),2010 5.P
14、.Sun et al.,Optics Express,18(8),20106.J.Zhang et al.,Optics Express,25(11),20171818OutlinenAbout AEMD centernHigh-efficiency(19 nm/mW)nanobeam thermo-optic filternLow-power(0.16 mW)nanobeam 2x2 thermo-optic switchnSubwavelength-grating bandpass filter with high sidelope suppression(27 dB)nHigh exti
15、nction ratio(30 dB)polarization beam splitternUltra-compact polarization beam splitter and rotatornSummary22 silicon optical switch:prior art19Broadband,high reliability,large footprintSmall footprint,narrow bandwidth22 optical switch based on Microring resonator(MRR)22 optical switch based on Mach-
16、Zehnder interferometer(MZI)Y.Li et al.,Photon.Research,Vol.3,(2015)Optical switch is a key component for on-chip optical networksInputThroughDropAddInputThroughDropAdd Bar state Cross state2 x 2 optical switching using a nanobeam cavity 20The operation principle is based on coupled mode theoryn A si
17、ngle nanobeam:A standing-wave resonatorUltra-small mode volume(V=(/2n)3)Energy distributes equally at each port (25%,6dB extinction ratio)TypeHeater lengthMZIfew mmMMR2R mNanobeam13 mThroughInAddDropProposed 22 TO nanobeam wavelength switch 21 Nanobeam switchMotivation:Optical switch with small devi
18、ce footprint and low switching powerEnhanced light-matter interactionUltra-small mode volumeEffective TO tuning,Ultra-low switching power HeaterNanobeamHuanying Zhou,et al.,Photonics Research,Vol.5,p 108,(2017)Dual nanobeam cavities with high extinction ratio 22Based on coupled mode theoryn Single n
19、anobeam:a maximum of 25%output at each port(-6dB).n Dual nanobeams:at|12|=,high efficiency output at drop port.FDTD simulation results:3dB-bandwidth 0.18nmThrough-port ER:19 dBDrop-port output:89%|12|=Device design layout23 Layout of our proposed TO nanobeam switch Heater1,2 for wavelength shiftHeat
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