全面设备效能课件.ppt

1、Overall Equipment Effectiveness: Improving Equipment Productivity 1 Copyright TEFEN Ltd., 1998 (一一)全面設備效能全面設備效能Overall Equipment Effectiveness: Improving Equipment Productivity 2 Copyright TEFEN Ltd., 1998大綱大綱介紹介紹 OEEOEE計算計算 OEEOEE測定測定 OEEOEE改善改善 OEEOEEOverall Equipment Effectiveness: Improving Equi

2、pment Productivity 3 Copyright TEFEN Ltd., 1998“全面設備效能 ” (OEE):是指設備以理論及理想加工速率,所生產可銷售產品之時間佔總工時的百分比”可用度 x 績效 x 品質產品的比例 效率 OEE =Overall Equipment Effectiveness: Improving Equipment Productivity 4 Copyright TEFEN Ltd., 1998OEE OEE 是是TPMTPM(Total Productive Maintenance)(Total Productive Maintenance)主要的績效

3、衡量主要的績效衡量指標指標OEE OEE 主要需要主要需要2 2類資訊類資訊: :設備理論的設備理論的/ /理想的運轉速率理想的運轉速率( (UPH-units per UPH-units per hour)hour)設備的狀況設備的狀況 ( (SEMI E10)SEMI E10)OEE OEE 衡量資本資產的有效利用以及它和財務衡量資本資產的有效利用以及它和財務結果間的關係結果間的關係Overall Equipment Effectiveness: Improving Equipment Productivity 5 Copyright TEFEN Ltd., 1998理論的/理想的處理時間

4、 (IPT) 是由一設備處理一個產品所需的理論上的“最佳”時間 (每一產品所需的分鐘數). 從IPT我們可以算出理論的機器生產速率,單位是(產品/小時)(UPH)SPT IPT標準處理時間(SPT) 是指在一般操作及沒有干擾的情況下,處理一個產品從track-in到track-out所需的時間 (in minutes per wafer)Overall Equipment Effectiveness: Improving Equipment Productivity 6 Copyright TEFEN Ltd., 1998IPT可以從下列地方獲得 : 設備供應商的資料 業界指標 模擬主要是用做

5、OEE 的計算Overall Equipment Effectiveness: Improving Equipment Productivity 7 Copyright TEFEN Ltd., 1998設備整個生命期中的成本所有生產出來好的產品“設備整個生命期中的成本”包括: 購買 安裝 操作 消耗 維護$/WaferCOO = Overall Equipment Effectiveness: Improving Equipment Productivity 8 Copyright TEFEN Ltd., 1998所有生產出來好的產品所有生產出來好的產品 = OEE x UPH x Time

6、of Life Cycle (TLC)設備整個生命期中的成本OEE x UPH x TLC$/WaferCOO = 當OEE增加時, COO會相對減少(在其他條件不變下)Therefore,Overall Equipment Effectiveness: Improving Equipment Productivity 9 Copyright TEFEN Ltd., 1998Comparison DimensionCOOOEEFunctionPredicts CostMeasures performanceFacilitates (Purpose)Equipment purchase deci

7、sionsEquipment improvementactivitiesUnits$ per good wafer% of PerfectScaleAbsoluteRelativeTool ComparisonsHighlights differences betweentools from different vendorsHighlights differences between(supposedly) identical tools,same tool over timeFrequency of AnalysisUsually one timeContinuousContextStan

8、d aloneIntegral part of TPMScopeCan compare different toolsthat perform the same processCan compare like toolsContinuous ImprovementNot useful for determining rootcause of poor performanceUseful for identifying rootcause of poor performanceVendor RequirementsRequires data from vendor(one time)Requir

9、es data and participation(continuous)Overall Equipment Effectiveness: Improving Equipment Productivity 10 Copyright TEFEN Ltd., 1998Current 廠 OEE (bottleneck area) =52%Current Output (per year) =$400M Target OEE (bottleneck area) =65%Projected Output = $500MProfit margin on incremental output = 30%I

10、ncrease in Profit =$30MIncreased profit per OEE % point =$2.3MOverall Equipment Effectiveness: Improving Equipment Productivity 11 Copyright TEFEN Ltd., 1998Total planned load on bottleneck set =170 wphCurrent achievable BN set OEE =50%BN tool UPH =36 wphBN tool costs =$10M/toolTotal BN tools requir

11、ed =10 ($100M)Target BN tool set OEE =60%Total BN tools required =8 ($80M)Capital Savings = $20M ($2M per OEE % point)Overall Equipment Effectiveness: Improving Equipment Productivity 12 Copyright TEFEN Ltd., 1998OEE 下列3種績效範疇的產物:可用度績效效率品質比例 Overall Equipment Effectiveness: Improving Equipment Produc

12、tivity 13 Copyright TEFEN Ltd., 1998AvailabilityRate EfficiencyOperationalEfficiencyRate of QualityxxxOEE 等於:PerformanceEfficiencyOverall Equipment Effectiveness: Improving Equipment Productivity 14 Copyright TEFEN Ltd., 1998有時候也指的是 “可用的生產時間”根據SEMI E10的定義,可用度是指全部可用時間與全部時間之間的比例它的計算方法如下:時間 全部 未被規劃的( 停

13、機-時間 全部+=可用度可用度時間)未被規劃時間:假日,定期保養.Overall Equipment Effectiveness: Improving Equipment Productivity 15 Copyright TEFEN Ltd., 1998績效效率是指設備以理論速率生產單一種產品的可用時間百分比它衡量的是:速率損失 (像是沒有效率的批次作業) 設備閒置或細微未被登記的停工與支援相關的損失( (績效效率績效效率) ) Performance Effi. = ( (速率效率速率效率) ) Rate Effi. x ( (操作效率操作效率) ) Operational Effi.Ov

14、erall Equipment Effectiveness: Improving Equipment Productivity 16 Copyright TEFEN Ltd., 1998速率效率(Rate Efficiency)速率效率也就是速率比率(Speed Ratio) 有2個方法可 計算速率效率方法 1:方法2: 理論的產出 實際的產出= 速率效率速率效率 實際的處理時間(APT) 理論的/理想的處理時間(IPT)= 速率效率速率效率Overall Equipment Effectiveness: Improving Equipment Productivity 17 Copyrigh

15、t TEFEN Ltd., 1998操作效率(Operational Efficiency)操作效率也就是操作比例(Operating Rate)它可以用下列方法計算: 可以使用的時間可以使用的時間 = 測試 + 準備妥當 + 生產 設備可以使用的時間 設備生產/運轉的時間(小時)= 操作效率操作效率Overall Equipment Effectiveness: Improving Equipment Productivity 18 Copyright TEFEN Ltd., 1998品質比例也就是 “First Run Capability”它可以用下列方法計算: 全部產出 全部產出 -(

16、廢棄物+重做)= 品質比例品質比例全部產出全部產出 = = 正常生產的產品正常生產的產品 + + 測試的產品測試的產品 + + 重做的產品重做的產品 + + 廢棄的產品廢棄的產品Overall Equipment Effectiveness: Improving Equipment Productivity 19 Copyright TEFEN Ltd., 1998Equipment StatesNON-SCHEDULEDSTATE UNSCHEDULED DOWNTIMESCHEDULED DOWNTIMEENGINEERING STATESTANDBY STATEPRODUCTIVE ST

17、ATEEquipment DowntimeManufacturing TimeOperations TimeEquipment UptimeNon-Scheduled TimeTotal TimeEngineering TimeOverall Equipment Effectiveness: Improving Equipment Productivity 20 Copyright TEFEN Ltd., 1998使OEE少於100%的因素可以分類至“6大損失中” 0. Non-Scheduled Time1. Equipment Failures2. Setup & Adjustments3

18、. Idling & Minor Stoppages4. Reduced Speed5. Defects in Process (Rework)6. Yield Loss (Scrap)OEEAvailabilityLossesPerformanceEfficiencyLossesRate ofQualityLossesOverall Equipment Effectiveness: Improving Equipment Productivity 21 Copyright TEFEN Ltd., 1998Availability LossesResponsibilityNon-Schedul

19、ed TimePlanned Fab/Area ShutdownsManagementNon-working Holidays ManagementEquipment Failures (Unscheduled Downtime) RepairsMaint./VendorChange of Chemicals /ConsumablesMaint./Manuf.Maintenance DelaysMaintenanceFacilities Maint./FacilitiesSet-up and Adjustments (Scheduled Downtimes)PMs Maint./VendorM

20、ajor Setup Maint./Eng./VendorQuals Manuf./Eng.Overall Equipment Effectiveness: Improving Equipment Productivity 22 Copyright TEFEN Ltd., 1998Performance Efficiency LossesResponsibilityIdling & Minor StoppagesWait for WIPManufacturingWait for OperatorManufacturingWait for Load/Unload ManufacturingWai

21、t for AssistManufacturingWait for Test ResultsManufacturingAssistManufacturingReduced Speed Machine JamsMaint./Eng./VendorTrainingManufacturingInefficient BatchingManufacturingProcess / Support Equipment Degradation Maint./Eng.Tool-to-Tool DifferencesMaint./Eng.Overall Equipment Effectiveness: Impro

22、ving Equipment Productivity 23 Copyright TEFEN Ltd., 1998Rate of Quality LossesResponsibilityDefects in Process (Rework)MisprocessingManufacturingUnadjusted Equipment MaintenanceMis-specification of ProcessEngineeringYield Loss (Scrap)Breakage (operator handling)ManufacturingBreakage (equipment)Main

23、t./Eng./VendorMisprocessingManufacturingProcess Tool FailureMaint./Eng./VendorFacilities FailureFacilities/Maint.Overall Equipment Effectiveness: Improving Equipment Productivity 24 Copyright TEFEN Ltd., 1998AvailabilityRate EfficiencyOperationalRate ofQualityxxxPreventive Maintenance Unscheduled Do

24、wntimeMajor Setups Maintenance DelaysQualsTheoretical OutputActual Wafer OutputReduced SpeedMinor Stoppages/AssistsProductive TimeEngineering TimeRegular productionStandby TimeLoad/UnloadWait for operatorEngineering lotsWait for WIPScrapReworkPERFORMANCE EFFICIENCY EfficiencyOverall Equipment Effect

25、iveness: Improving Equipment Productivity 25 Copyright TEFEN Ltd., 1998Overall Equipment Effectiveness: Improving Equipment Productivity 26 Copyright TEFEN Ltd., 1998方法:可用度 x 績效 x 品質產品的比例 效率 OEE =Overall Equipment Effectiveness: Improving Equipment Productivity 27 Copyright TEFEN Ltd., 1998Overall E

26、quipment Effectiveness: Improving Equipment Productivity 28 Copyright TEFEN Ltd., 1998Process A (IPT) = 2.5 min/wafer= 24.0 wafers/hr.Process B (IPT) = 3.3 min/wafer= 18.18 wafers/hrEquipStateRun Time WafersProcessedEquipStateRun Time WafersProcessedReg Prod20.4 hr427Reg Prod68.7 hr1033Engr Prod 4.7

27、 hr99Engr Prod 0.0 hr0Rework 3.0 hr47Rework 5.6 hr68TotalProduct A28.1hr573TotalProduct B74.3 hr1101Total Time = 168 hrEngineering State = 5 hrStandby State = 24.6 hrProductive State = 102.4 hr (28.1 hr + 74.3 hr)ProcessGood WafersReworkedScrapTotal ProcessedA524472573B10306831101Total155411551674Ov

28、erall Equipment Effectiveness: Improving Equipment Productivity 29 Copyright TEFEN Ltd., 1998全部時間 = 168 hr沒有規劃的時間 = 0 hr沒有規劃的當機 = 8 hr規劃的停機 = 28 hr規劃的停機包括: 有計劃的維護 = 10 hr 生產改機 = 12 hr 化學原料/氣體轉換 = 2 hr 維護的延誤 = 4 hrSEMATECH., Semiconductor Manufacturing Productivity OverallEquipment (OEE) Guidebook Re

29、vision 1.0, Report No. 95032745A-GEN, Austin, TX (1995).Overall Equipment Effectiveness: Improving Equipment Productivity 30 Copyright TEFEN Ltd., 1998可用度786. 0168)0828(168=+-=AvailabilityOverall Equipment Effectiveness: Improving Equipment Productivity 31 Copyright TEFEN Ltd., 1998速率效率 / 速率比率 83. 0

30、67. 303. 3Time Processing ActualTime Processing Ideal=Efficiency Rate=wafermin /03.311015731101.33+5735 .2=(IPT) Time Processing Ideal=+wafermin /67. 31101573064.37+601 . 82=(APT) Time Processing Actual=+xxxxOverall Equipment Effectiveness: Improving Equipment Productivity 32 Copyright TEFEN Ltd., 1

31、998操作效率績效效率Performance Efficiency = 0.83 x 0.776 = 0.644品質比例928. 016745)(115-1674=Quality of Rate=+776. 024.6hr+5.0hr+102.4hr102.4hr= Rate Operating=Overall Equipment Effectiveness: Improving Equipment Productivity 33 Copyright TEFEN Ltd., 1998OEE = = 0.786 (Avail) x 0.644 (Perf) x 0.928 (Qual) x 10

32、0 = 47%利用下列方法算出OEE :Overall Equipment Effectiveness: Improving Equipment Productivity 34 Copyright TEFEN Ltd., 1998Overall Equipment Effectiveness: Improving Equipment Productivity 35 Copyright TEFEN Ltd., 1998資料收集不是小事理論的設備運轉速率設備狀況OEE的計算對於理想的處理時間或理論的運轉速率的計算非常敏感,因此,它們需要被正確地估算出來要準確且持續地追蹤設備的狀況Overall E

33、quipment Effectiveness: Improving Equipment Productivity 36 Copyright TEFEN Ltd., 1998設備狀況的資料收集有三種基本的方法直接法 (自動的設備控制系統:CIM)狀態可以被自動且持續地追蹤對於設備損失的根本原因無法全面透視Overall Equipment Effectiveness: Improving Equipment Productivity 37 Copyright TEFEN Ltd., 1998間接法 (用MES法作資源追蹤)狀況是以半自動的方法持續追蹤對於根本原因有較高的透視度,但有時會有不正確的

34、資料輸入間接法 (多元化觀察研究)狀況經由活動抽樣及手動的方式追蹤對於根本原因可以提供最高的透視度,良好的準確度Overall Equipment Effectiveness: Improving Equipment Productivity 38 Copyright TEFEN Ltd., 1998OEE SoftwareDefine Entities (Tools) to be SampledDefine “Machine Status” for Each EntityDefine Identification CriteriaDetermine Sampling Frequency24

35、Hour Continuous SamplingStatistical & Qualitative AnalysisData Verification & Cross AnalysisFindings & Recommendations Manufacturing Supervisors Operators Process Engineers Layout Constraints Desired Confidence levels No. of EntitiesQualitative Findings & Observations During Study Area of InterestOv

36、erall Equipment Effectiveness: Improving Equipment Productivity 39 Copyright TEFEN Ltd., 1998由受過訓練的人員收集設備的主要狀況與次要狀況的資料結果是:正確的設備狀況的描寫損失的Pareto分析經由直接觀察生產區以收集定性資訊Category#Description of Equipment StateStepper 1Stepper 2Stepper 3Stepper 4P1Running P1R2Running P2O3Running P3D4Running P4U5Running P5C6Runn

37、ing qual lotT7Running test wafersI8Running Engineering Lot/sO9Running rework lotsN10other11Wait for WIPI12Wait for loadD13Wait for assistL14Wait for reticleI15Wait for data entryN16Wait for engineerG17Wait for Re-boot18OtherS20Reticle changeE21Flat checkT22Daily qualU23OtherPD30Wait for technicianO3

38、1Wait for engineerW32Trouble shootingN33Repair34Wait for part35PM-136PM-237PM-338PM-439Lamp change40Wait for test results41Wait for vendor42Wait for all clear (evacuation)43Wait for facilities44Wait for utilities45OtherOverall Equipment Effectiveness: Improving Equipment Productivity 40 Copyright TE

39、FEN Ltd., 1998在適當損失的水準下,執行 Pareto 分析影響分析 這些分析結果決定了改善活動的優先次序使用相同的 OEE 計算應用法則,我們可以追蹤改善活動所帶來的影響Overall Equipment Effectiveness: Improving Equipment Productivity 41 Copyright TEFEN Ltd., 1998設備狀況的正確衡量對所有產能損失原因的鑑定日班夜班的比較,前半星期與後半星期的比較在休息,午餐及 pass down 期間的產能損失生產區的人員配置,包括作業員與技術人員Overall Equipment Effectiven

40、ess: Improving Equipment Productivity 42 Copyright TEFEN Ltd., 1998可用生產時間的績效 操作程序的評估區域配置與工作站設計的評估改善的建議Overall Equipment Effectiveness: Improving Equipment Productivity 43 Copyright TEFEN Ltd., 1998Pareto Chart of Equipment Down States0%5%10%15%20%25%30%OtherWait for test resultsWait for partWait for

41、 vendorLamp changeReticle changeRepairDaily qualPM-1Wait for techPM-3Pareto 分析 (停機 狀況)Overall Equipment Effectiveness: Improving Equipment Productivity 44 Copyright TEFEN Ltd., 1998TPM 的改善程序這個 Pareto圖表顯示PM3, Wait for tech, PM1 and Daily qual 是主要的損失將TPM團隊集中在預防性維護(Preventive Maintenance PM)上:確認與這些活動相關

42、的資料是否足夠如果不夠,要執行PM分析以確認所有PM活動的具體內容與效率Overall Equipment Effectiveness: Improving Equipment Productivity 45 Copyright TEFEN Ltd., 1998建議 根據PM研究的結果,小組也許會建議下列事項:PM 的查檢表工具的購買訊練視覺輔助溝通的改善PM kits較佳的備用零件系統PM 的團隊執行更多的技術人員作業員可以執行某方面的 PMOverall Equipment Effectiveness: Improving Equipment Productivity 46 Copyrig

43、ht TEFEN Ltd., 1998Overall Equipment Effectiveness: Improving Equipment Productivity 47 Copyright TEFEN Ltd., 1998以隨機抽樣的方式進行250小時總共1,000個樣本每個設備的抽樣樣本數:Equipment StateNo. of Samples% of TotalHours in StateProductive/Running75075.0%187.50Standby/Idle/Wait252.5%6.25Setup505.0%12.50Preventive Maintenance

44、757.5%18.75Unscheduled Downtime10010.0%25.00Total1000100%250Overall Equipment Effectiveness: Improving Equipment Productivity 48 Copyright TEFEN Ltd., 1998在研究期間經由這項設備所處理的產品數量是5000個(包括重做及廢棄的產品)重做比例佔了這個設備所有運轉時間的5%對正常的產品而言,產出損失的比例是7.5% (也就是非重做的產品)理論的機器生產速率(UPH)是40產品/小時Overall Equipment Effectiveness: I

45、mproving Equipment Productivity 49 Copyright TEFEN Ltd., 1998為這六大設備損失計算出以小時為單位的時間 決定OEE的百分比決定OEE的績效範疇可用度績效效率品質比例Overall Equipment Effectiveness: Improving Equipment Productivity 50 Copyright TEFEN Ltd., 1998這六大設備損失有些可以直接從下面表格所提供的抽樣資料中得出,像是 設備錯誤 =未規劃的當機 = 25 hrs. 改機與調整 =規劃的停機 = 12.50 + 18.75 = 31.25

46、hrs.閒置與細部停工 = 準備/閒置/等待= 6.25 hrs.程序中的瑕疵 (重做的損失) = = 187.5 x 5% = 9.4 hrs.產出損失 (廢棄損失) = (187.5 - 9.4) x 7.5% = 13.4 hrs.Overall Equipment Effectiveness: Improving Equipment Productivity 51 Copyright TEFEN Ltd., 1998Equipment LossesNo of HoursPercent of TotalEquipment Failures2510.0%Setup and Adjustme

47、nts31.2512.5%Idling and Minor Stoppages6.252.5%Reduced Speed54.922.0%Defects in Process (rework loss)9.43.8%Yield Loss13.45.4%Total Losses140.256.1%The following table summarizes the total equipment losses Overall Equipment Effectiveness: Improving Equipment Productivity 52 Copyright TEFEN Ltd., 199

48、8理論的產出理論的產出 = UPH x TPT= 40 x 187.5 = 7,500 wafers where, UPH = Units per hour, or theoretical machine/speed rate TPT = Total running time/productive state (in hours)在生產期間有 33.33% (100% - 66.67%) 的速率損失相當於 62.5 hours (33.33% of 187.5 hours) 速率損失包括因為廢棄及重做所導致的損失 速率損失速率損失 = (62.5 x 95%) x 92.5% = 54.9 h

49、ours667. 07,5005,000Output TheoreticalOutput Actual= 速率比率速率比率=Overall Equipment Effectiveness: Improving Equipment Productivity 53 Copyright TEFEN Ltd., 1998我們可以利用下列二種關係從設備損失的表格中把OEE直接算出來1. OEEOEE = 全部時間 全部設備損失 = = 250 140.2 = 109.8 hrs = 43.9% 2. OEEOEE = 生產/運轉時間 (速率降低的損失 + + 重做的損失 + 產出損失) = = 187.

50、5 (54.9 + 9.4 + 13.4) = 109.8 hrs = 43.9% Overall Equipment Effectiveness: Improving Equipment Productivity 54 Copyright TEFEN Ltd., 1998Idling & Minor Stoppages2.5%Setup & Adjustments12.5%Equipment Failures10.0%Reduced Speed21.9%Rework Loss4%Yield Loss5.4%OEE43.9%Overall Equipment Effectiveness: Im